ELECTRODE CONSTRUCTION FOR THE FORMATION OF A DIELECTRIC BARRIER PLASMA DISCHARGE

摘要

The invention relates to an electrode arrangement for forming a dielectric barrier plasma discharge between an electrode (1) supplied with an AC high voltage by a control device (20) and a treatment surface (21) of an electrically conductive body (22), said arrangement functioning as a ground electrode, wherein a dielectric material (8) completely covers the electrode (1) up to the treatment surface (21) and forms a contact side for the surface (21). The electrode arrangement permits effective and homogeneous formation of the plasma (23), in particular for large treatment surfaces (21), because the electrode (1) consists of at least two electrode portions (2, 3) arranged next to one another at the same distance (6) from the contact side and insulated from one another by the dielectric material (8), and because adjacent electrode portions are supplied by the control device with compensating partial AC voltages which are mirror-inverted in terms of the waveform and the voltage level.