Resistance element with specific piezoresistance coefficient, stress-compensated sensor system and method

摘要

A resistance element having a specific piezoresistance coefficient, the resistance element comprising: a resistance region of a single conductivity type formed in a semiconductor substrate, the semiconductor substrate comprising a first main surface area, the resistance region being parallel to the main surface area in a lateral direction and perpendicular to the vertical direction Main surface area extends, wherein the resistance region is isolated from the semiconductor substrate in the lateral direction and for a stress component comprises a first piezoresistive coefficient for a current flow in the lateral direction and a second piezoresistive coefficient, which is different from the first piezoresistive coefficient, for a current flow in the vertical direction; a first contact structure configured to contact at least a portion of a first area of the resistance region that pa is positioned parallel to the main surface area and at a first distance from the main surface area; a second contact structure configured to be in contact with at least part of a second surface of the resistance region, which is different from the first surface, parallel to the main surface area and at a second distance to the major surface area that is different from the first distance; wherein the resistance element is configured in response to an input signal applied to at least one of the first contact structure and the second contact structure, a current flow distribution within the resistance region between the first contact structure and the generate a second contact structure, the current flow distribution having a lateral component and a vertical component, a combination of the lateral component and the vertical component leading to a piezoresistance coefficient of the resistance element, which is defined by the relationship between the lateral component in the lateral direction in the resistance region with the first piezoresistance coefficient for the current flow in the lateral direction and the vertical component in the vertical direction in the resistance region with the second piezoresistance coefficient for the current flow in the vertical direction the resistance element is designed such that a relationship between the lateral component and the vertical component within the resistance region is obtained, which leads to the specific piezoresistance coefficient; the resistance region comprises a limiting structure which is formed such that the ratio between the lateral component and the vertical component within the resistance region is obtained, which leads to the specific piezoresistance coefficient; andwherein the delimiting structure is formed such that the resistance region comprises a cross-sectional reduction in the lateral direction in a partial region.