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Method for separating a semiconductor component with a pn junction and semiconductor component with a pn junction

机译:分离具有pn结的半导体部件的方法和具有pn结的半导体部件

摘要

The invention relates to a semiconductor component (1a, 1b, 1c, 1d, 1e) with at least one emitter (2a, 2b, 2c), at least one base (3a, 3b, 3c, 3d, 3e), with a base (3a , 3b, 3c, 3d, 3e) a pn junction (4a, 4b, 4c) is formed, with at least one non-metallic cross-conductor layer for cross-conducting majority charge carriers of the emitter, the emitter (2a, 2b, 2c) comprising the cross-conductor layer and / or the transverse line layer is formed parallel to the emitter (2a, 2b, 2c) and connected to it in an electrically conductive manner, and with a break side on which the semiconductor component (1a, 1b, 1c, 1d, 1e) has been separated. It is essential that a cross-line avoidance area (5a, 5b, 5c, 5d, 5e) is designed and arranged on the fracture side in such a way that the cross-conductivity capability is reduced by at least a factor of 10, the cross-line avoidance area (5a, 5b, 5c, 5d, 5e ) perpendicular to the fracture side has a depth (TQ) in the range 5 µm to 500 µm, in particular 10 µm to 200 µm. The invention further relates to a method for separating a semiconductor component.
机译:本发明涉及一种具有至少一个发射极(2a,2b,2c),至少一个基极(3a,3b,3c,3d,3e)的半导体组件(1a,1b,1c,1d,1e),其具有基极(3a,3b,3c,3d,3e)形成一个pn结(4a,4b,4c),其中至少有一个非金属交叉导体层,用于使发射极,发射极(2a)的多数电荷载流子交叉导电包括交叉导体层和/或横向线层的图2b,2b,2c)平行于发射极(2a,2b,2c)形成并以导电方式连接到发射极(2a,2b,2c),并具有半导体的断裂面。组件(1a,1b,1c,1d,1e)已分离。至关重要的是,交叉线回避区域(5a,5b,5c,5d,5e)的设计和布置应在断裂侧,以使交叉传导能力至少降低10倍,即垂直于断裂侧的交叉线避免区域(5a,5b,5c,5d,5e)具有在5μm至500μm,特别是10μm至200μm的范围内的深度(TQ)。本发明还涉及一种用于分离半导体部件的方法。

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