CONTACT SIZES TO REDUCE THE BRIDGE RISK AND IMPROVE PERFORMANCE

摘要

A first gate structure, a second gate structure and a third gate structure each run in a first direction. A first gate via is arranged on the first gate structure. The first gate via has a first size. A second gate via is arranged on the second gate structure. The second gate via has a second size that is larger than the first size. A third gate via is arranged on the third gate structure. The third gate via has a third size that is smaller than the second size but larger than the first size. A first source contact is arranged adjacent to a first side of the first gate via. A first drain contact is disposed adjacent to a second side of the first gate via that is opposite the first side. A second drain contact is disposed adjacent to a first side of the third gate via.