Method for optimizing laser processing carried out with a laser processing device, as well as laser processing device

摘要

The present invention relates to a method for optimizing a laser processing carried out with a laser processing device, wherein in the course of the laser processing a laser radiation source (1) generates laser radiation (10) and emits it along an optical path (2) in the direction of a working plane (3) the laser radiation (10) is modulated by means of a spatial light modulator (4) arranged downstream of the laser radiation source (1) in the optical path (2), and wherein the modulated laser radiation (20) is focused on the working plane (3), comprising the following , steps carried out in a closed-loop control loop: i. Determining at least one actual feature of the laser radiation (10) and / or the modulated laser radiation (20) using at least one camera unit (K1, K2, K3, KA); ii. Comparing the at least one actual feature of the laser radiation (10) and / or the modulated laser radiation (20) with at least one predetermined target feature and determining a respective feature deviation; iii. Assessment of the feature deviation and, if necessary, adjustment of at least one setting parameter. Furthermore, the invention relates to a laser processing device which is set up to carry out the method according to the invention. With the method on which the invention is based and the laser processing device, simplified monitoring and control of the alignment and shaping of laser radiation is achieved enables. The process provides a basis for laser processing with shaped laser radiation with high process stability.