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Method for producing a holding and positioning device and a heat sink
Method for producing a holding and positioning device and a heat sink
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机译:保持定位装置的制造方法和散热器
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摘要
The invention relates to a method for producing a holding and positioning device (16), in particular a hexapod, preferably for holding and positioning an optical element, comprising: producing at least two components (7, 12) of the holding and positioning device (16) Additive manufacturing, as well as joining the at least two components (7, 12) by means of a non-positive, positive and / or material connection to produce the holding and positioning device (16) The invention also relates to such a holding and positioning device (16), a method for producing a heat sink by additive manufacturing, such a heat sink and an EUV lithography device.
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