Method, device and computer program for determining a wavefront of a mass-laden particle beam

摘要

The present application relates to a method (3300) and a device (200) for determining a wavefront (550) of a mass-affected particle beam (225, 510, 1910) with the following steps: (a) Recording (3320) two or more images (310 -390) a reference structure (130) with the mass-affected particle beam (225, 510) under different recording conditions (315, 325); (b) generating (3330) point spreading functions (1750) for the two or more recorded images (310-390) with a modified reference image (480) of the reference structure (130); and (c) carrying out (3440) a phase reconstruction of the mass-affected particle beam (225, 510) based on the generated point spread functions (1750) and the various recording conditions (315, 325) for determining the wavefront (550).