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PSEUDO STRETCH FASHION MEMS RING GYROSCOPE
PSEUDO STRETCH FASHION MEMS RING GYROSCOPE
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机译:伪弹性时尚MEMS陀螺仪
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摘要
A strain mode electrostatic MEMS gyroscope is described. The MEMS gyroscope operates in a stretch mode. The MEMS gyroscope has an oscillating ring structure that is electrostatically excited into the stretching mode.
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