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METHOD FOR DETERMINING THE DYNAMICS OF CHARGE CARRIERS IN A SEMICONDUCTOR MATERIAL AND ASSOCIATED DEVICE

机译:测定半导体材料及相关设备中电荷载体动力学的方法

摘要

One aspect of the invention relates to a method for determining the dynamics of charge carriers in a semiconductor material comprising a first step of determining a model accounting for the normalized surface potential in the semiconductor material subjected to a light beam modulated as a function of at least one growth time constant and at least one decay time constant; for a plurality of sets of time constants, a second step of calculating, from the determined model and for a plurality of modulation frequencies of a light beam, of the normalized value of the surface potential as a function of time so obtaining the saturation of the value of the normalized surface potential as a function of time; for the plurality of sets of time constants, a third step of determining, for each modulation frequency of a light beam, the average normalized surface potential over the period following saturation; and a fourth step of adjusting the average normalized surface potential obtained for each of the modulation conditions of a light beam to experimental data so as to determine at least one growth time constant and at least one time constant of growth. decrease.
机译:本发明的一个方面涉及一种用于确定半导体材料中的电荷载流子的动力学的方法,该方法包括以下步骤:确定模型,该模型考虑经受至少作为函数而调制的光束的半导体材料中的归一化表面电势。一个生长时间常数和至少一个衰减时间常数;对于多组时间常数,第二步是根据确定的模型和光束的多个调制频率,计算表面电势的归一化值随时间的变化,从而获得饱和度。归一化表面电势的值随时间的变化;对于多组时间常数,第三步是针对光束的每个调制频率,确定饱和之后的一段时间内的平均归一化表面电势;第四步,将针对光束的每个调制条件获得的平均归一化表面电势调整为实验数据,以确定至少一个生长时间常数和至少一个生长时间常数。减少。

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