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High aspect ratio mirror and mirror substrate, and method and means for producing such a mirror substrate
High aspect ratio mirror and mirror substrate, and method and means for producing such a mirror substrate
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机译:高纵横比的镜和镜基板,以及用于生产这种镜基板的方法和装置
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摘要
The invention generally relates to a mirror and a mirror substrate, especially a mirror and a mirror substrate having a high aspect ratio, and a method and means for producing them. Figure for the abstract: Fig 1
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