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MIRROR AND MIRROR SUBSTRATE WITH HIGH ASPECT RATIO, AND METHOD AND MEANS FOR PRODUCING SUCH MIRROR SUBSTRATE
MIRROR AND MIRROR SUBSTRATE WITH HIGH ASPECT RATIO, AND METHOD AND MEANS FOR PRODUCING SUCH MIRROR SUBSTRATE
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机译:具有高纵横比的镜面和镜面基板,以及生产这种镜面基板的方法和装置
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摘要
To provide a mirror substrate which has a high aspect ratio and small absolute thickness and also offers superior surface quality, dimensional precision and stability, and to provide a support body that can be used to produce the high aspect ratio mirror substrate and a mirror, and a method of manufacturing such mirror substrate and mirror.SOLUTION: A mirror substrate disclosed herein has a mean linear thermal expansion coefficient, a ratio of a lateral dimension to a maximum thickness, a weight per unit area, and a surface roughness, which are within specific conditional ranges.SELECTED DRAWING: None
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