A sealed pipe structure applied to manufacturing equipment for manufacturing semiconductors or displays and a sealed flange constituting a sealed pipe structure applied to manufacturing equipment for manufacturing the semiconductor or display

摘要

Disclosed is a hermetically sealed piping structure applied to manufacturing equipment for manufacturing a semiconductor or display, and a hermetically sealed flange constituting a hermetically sealed piping structure applied to a manufacturing equipment for manufacturing a semiconductor or display. According to the disclosed closed pipe structure applied to manufacturing equipment for manufacturing a semiconductor or display and a closed flange constituting a closed pipe structure applied to manufacturing equipment for manufacturing the semiconductor or display, for manufacturing the semiconductor or display A sealed piping structure applied to manufacturing equipment is applied to manufacturing equipment for manufacturing semiconductors or displays, including a first piping member, a sealed flange, a connecting flange, and a second piping member, wherein the sealed flange is a body Includes a portion, an O-ring seating portion, and a protrusion, and the inside of the first piping member, the inside of the sealed flange, the inside of the connecting flange, and the inside of the second piping member are stepless. As it is connected in a state, there is an advantage in that the sealing between the sealed flange and the connected flange can be sealed without the centering applied when connecting the conventional pipe.