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弾性波装置

摘要

Problem to be solved: to provide an elastic wave device capable of suppressing spurious by the mirror mode.Solution: the elastic wave device 1 is provided on the support substrate 2, the acoustic reflection film 7 provided on the support substrate 2, the piezoelectric layer 4 having the first principal surfaces 4A and 4B, and at least one of the first principal surface 4A and the second main surface 4b of the piezoelectric layer 4 and at least one of them The first plate electrode 5 and the second flat plate electrode 6 (excitation electrode) are provided.The acoustic reflective film 7 has an alternating acoustic impedance layer and a low acoustic impedance layer.At least one of the high acoustic impedance layer and the low acoustic impedance layer is a laminate of a first material layer 12a and a second material layer 12b, at least one of the longitudinal acoustic impedance and the transverse acoustic impedance is substantially the same.An interface 12C between the first material layer 12a and the second material layer 12b is provided with an uneven surface.Diagram

著录项

  • 公开/公告号JP2020113954A

    专利类型发明专利

  • 公开/公告日2020.07.27

    原文格式PDF

  • 申请/专利权人 株式会社村田製作所;

    申请/专利号JP2019005426

  • 发明设计人 永友 翔;

    申请日2019.01.16

  • 分类号

  • 国家 JP

  • 入库时间 2022-08-21 10:58:06

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