Device and method for identifying resonant frequency, and method for identifying resonant frequency

摘要

Problem to be solved: to miniaturize the apparatus and to improve the working efficiency of the work for specifying the resonance frequency.The resonance frequency FM as the frequency of the AC signal S1 when the deflection angle of the MEMS mirror device 100 is changed to a maximum value by changing the angle of deflection of the reflected light by the rotation of the mirror by supplying the AC signal S1 for driving can be identified.A signal output section 11 capable of outputting an AC signal S1 while changing its frequency, andThe measurement unit 12 measures the resistance value R based on the output signal S2 output from the MEMS mirror element 100 in the state where the AC signal S1 is supplied to the MEMS mirror elementThe processing unit 16 is provided with a processing unit 16 for performing a specific process for specifying the resonance frequency FM on the basis of the frequency when the resistance value r varies with the frequency change.Diagram