SCHÄTZUNGSMETHODE DER LOKALEN TOPOGRAPHIE EINER PROBE AUF DER GRUNDLAGE VON BILDERN EINES RASTERELEKTRONENMIKROSKOPS UND EINEM MATHEMATISCHEN MODELL

摘要

One aspect of the present invention relates to a method (100) for estimating the local topography of a sample, which includes:-A step (102) of obtaining a plurality of sample images with different incident angles by a scanning electron microscope;-Each image:+Step of calculating gray level horizontal section (103);+Step (104) of placing multiple main descriptors on the gray level distribution map;+87288; the step of calculating the secondary descriptor according to the primary descriptor (105);+One step of the mathematical model (106) is used to calculate the primary terrain quantity from the secondary descriptor;-A step to evaluate the local terrain ((107) uses a mathematical model to calculate the secondary terrain size based on the original terrain size and the previously calculated sub terrain descriptor.