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APPAREIL OPTIQUE, APPAREIL DE MESURE, PROCÉDÉ DE MESURE, APPAREIL DE BALAYAGE, ET PROCÉDÉ DE BALAYAGE

摘要

An optical apparatus includes a first optical element and a second optical element capable of separating incident light according to a wavelength of the incident light. The first optical element includes a first separation section having first optical characteristics for reflecting light in a first wavelength band, transmitting light in a second wavelength band, and partially transmitting and partially reflecting light in a third wavelength band. The second optical element includes a second separation section having second optical characteristics for separating incident light that is incident in two wavelength bands including the first wavelength band or the second wavelength band and the third wavelength band into the light in the first wavelength band or the light in the second wavelength band and the light in the third wavelength band according to the wavelength.

著录项

  • 公开/公告号EP3081974B1

    专利类型

  • 公开/公告日2020.06.03

    原文格式PDF

  • 申请/专利权人 Nikon Corporation;

    申请/专利号EP14869374.0

  • 发明设计人

    申请日2014.12.08

  • 分类号

  • 国家 EP

  • 入库时间 2022-08-21 10:53:42

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