PROCÉDÉ DE CORRECTION D'APPAREIL DE MESURE DE LA DISTRIBUTION DE TAILLE DE PARTICULES, PROCÉDÉ D'ÉTALONNAGE D'APPAREIL DE MESURE DE LA DISTRIBUTION DE TAILLE DE PARTICULES, APPAREIL DE MESURE DE LA DISTRIBUTION DE TAILLE DE PARTICULES ET SYSTÈME D'ANALYSE DE GAZ

摘要

The present invention is intended to improve reliability of measurement accuracy of a particle size distribution measuring apparatus and directed to a method of correcting a particle size distribution measurement result of the particle size distribution measuring apparatus 4 that is adapted to measure a particle size distribution of particles contained in target gas to be measured, the method includes: correcting the particle size distribution measurement result, using a correction coefficient A that is calculated based on the particle number measurement result obtained by measuring the number of particles contained in the target gas to be measured using a condensation particle counter 3 and a value indicating a counting efficiency of the condensation particle counter 3, as parameters, or calibrating the particle size distribution measuring apparatus 4.