The effective pumping speed of the forseen ventline is in the order of 1 1/sec, which would be in almost cases insufficient to achieven-3 pressures below 10 torr. The turbomolecular pump TURBOVAC 100 MSL, which has been studied here, has a pumping speed of 125 1/sec and will improve the pressure in the furnaces by a factor of 10 to 100.nThe compression of hydrogen of this pump is rather high K~ 20.000.nThe proposed pump has magnetic bearing system for the rotor suspension, which hasthe advantages to give extremely low vibration level ( <.01 mm/sec) and power consumption ( ~10 W). In addition magnetic bearing have shown to be suitable for high speed rotors in 0 gravity environment. One aim was to study the feasibility and the yield of manufacturing drawings of the space version of the pump.
展开▼