MOEMS Modeling Using the Geometrical Matrix Toolbox

摘要

New technologies such as MicroOptoElectro-Mechanical Systems (MOEMS) require new modeling tools. These tools must simultaneously model the optical, electrical, and mechanical domains and the interactions between these domains. To facilitate rapid prototyping of these new technologies an optical toolbox has been developed for modeling MOEMS devices. The toolbox models are constructed using MATLAB's dynamical simulator, Simulink. Modeling toolboxes will allow users to focus their efforts on system design and analysis as opposed to developing component models. This toolbox was developed to facilitate rapid modeling and design of a MOEMS based laser ultrasonic receiver system.