Isolation of components on a silicon wafer using SiO2

机译：使用siO 2在硅晶片上隔离组件

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Isolation of components on silicon wafer by groove etching and silicon dioxide deposition

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作者
Skouson, G. W.;
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年度 1966
页码 1-41
总页数 41
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
DEPOSITION; ETCHING; GROOVES; ISOLATION; POLYCRYSTALS; SILICON; SILICON COMPOUNDS; SILICON DIOXIDE; SUBSTRATES; WAFERS; DEPOSITION; ETCHING; GROOVE; ISOLATION; SILICON COMPOUND;

机译：沉积;蚀刻; GROOVEs;隔离;多晶体;硅;硅化合物;二氧化硅;的底物; WaFERs;沉积;蚀刻;槽;隔离;硅化合物;

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专利

1. Double-layer antireflection from silver nanoparticle integrated SiO2 layer on silicon wafer: effect of nanoparticle morphology and SiO2 film thickness [J] . Parashar Piyush K., Sharma R. P., Komarala Vamsi K. Journal of Physics, D. Applied Physics: A Europhysics Journal . 2017,第3期

机译：硅晶片上银纳米粒子集成SiO2层的双层抗反射：纳米颗粒形态和SiO2膜厚度的影响
2. Low-Temperature, Strong SiO2-SiO2 Covalent Wafer Bonding for III–V Compound Semiconductors-to-Silicon Photonic Integrated Circuits [J] . Di Liang, Alexander W. Fang, Hyundai Park, Journal of Electronic Materials . 2008,第10期

机译：III–V化合物半导体与硅光子集成电路的低温，强SiO2 -SiO2 共价晶片键合
3. Ultra-thin silicon oxide layers on crystalline silicon wafers: Comparison of advanced oxidation techniques with respect to chemically abrupt SiO2/Si interfaces with low defect densities [J] . Stegemann Bert, Gad Karim M., Balamou Patrice, Applied Surface Science . 2017,第Feba15期

机译：晶体硅晶片上的超薄氧化硅层：具有低缺陷密度的化学突变SiO2 / Si界面方面先进氧化技术的比较
4. Horizontal Cu/SiO2/Si/SiO2/Cu plasmonic waveguide components integrated in silicon photonic circuits [C] . Zhu Shiyang Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2012 and the National Fiber Optic Engineers Conference . 2012

机译：集成在硅光子电路中的水平Cu / SiO2 / Si / SiO2 / Cu等离子体激元波导组件
5. Advanced processing methods for microelectronics industry silicon wafer handling components. [D] . Wang, Hongyun. 1999

机译：用于微电子行业的硅晶片处理组件的先进处理方法。
6. Growth and Self-Assembly of Silicon–Silicon Carbide Nanoparticles into Hybrid Worm-Like Nanostructures at the Silicon Wafer Surface [O] . Manuel Alejandro Perez-Guzman, Rebeca Ortega-Amaya, Yasuhiro Matsumoto, 2018

机译：碳化硅-碳化硅纳米粒子在硅晶片表面的生长和自组装成蠕虫状纳米杂化结构。
7. INTERNAL FRICTION AND YOUNG'S MODULUS MEASUREMENTS ON SiO2 AND Ta2O5 FILMS DONE WITH AN ULTRA-HIGH Q SILICON-WAFER SUSPENSION [O] . Granata, M, Balzarini, L, Degallaix, J, 2015

机译：超高Q硅晶圆悬浮液对SiO2和Ta2O5薄膜的内部摩擦和杨氏模量的测量

Isolation of components on a silicon wafer using SiO2

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