机译:III–V化合物半导体与硅光子集成电路的低温,强SiO2 sub> -SiO2 sub>共价晶片键合
Department of Electrical and Computer Engineering University of California Santa Barbara Santa Barbara CA 93106 USA;
Department of Electrical and Computer Engineering University of California Santa Barbara Santa Barbara CA 93106 USA;
Department of Electrical and Computer Engineering University of California Santa Barbara Santa Barbara CA 93106 USA;
Department of Electrical and Computer Engineering University of California Santa Barbara Santa Barbara CA 93106 USA;
Lincoln Laboratory Massachusetts Institute of Technology Lexington MA 02420-9108 USA;
Lincoln Laboratory Massachusetts Institute of Technology Lexington MA 02420-9108 USA;
Department of Electrical and Computer Engineering University of California Santa Barbara Santa Barbara CA 93106 USA;
Wafer bonding; hybrid integration; compound semiconductors; silicon-on-insulator; photonic integrated circuits;
机译:用于III-V化合物半导体至硅光子集成电路的低温强SiO_(2)-SiO_(2)共价晶圆键合
机译:Si混合光子集成电路III-V芯片上晶圆等离子体激活粘合技术的检查
机译:Si混合光子集成电路III-V芯片上晶圆等离子体激活粘合技术的检查
机译:集成在硅光子电路中的水平Cu / SiO2 / Si / SiO2 / Cu等离子体激元波导组件
机译:晶圆结合低温生长的化合物半导体材料,用于光电器件应用。
机译:III–V硅上光子集成电路用于2-4μm波长范围内的光谱传感
机译:用于光电集成电路异构集成的高通量多晶片到晶圆键合技术和III / V-on-si混合激光器