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Focussing system for an ion source having apertured electrodes Patent

机译：用于具有带孔电极的离子源的聚焦系统

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摘要

Apertured electrode focusing system for ion sources with nonuniform plasma density

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作者
Sohl, G.; Speiser, R. C.;
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年度 1967
页码 1-4
总页数 4
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
APERTURES; ELECTRODES; FOCUSING; ION SOURCES; PLASMA DENSITY; NONUNIFORM PLASMAS;

机译：小孔;电极，聚焦;离子源;等离子体密度; NUNUNIFORm pLasmas;

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Focussing system for an ion source having apertured electrodes Patent

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