Practical microgripper by fine alignment, eutectic bonding and SMA actuation

摘要

A silicon microgripper with a large gripping force, a relatively rigid structural body, and flexibility in functional design is presented. The actuation is generated by Ni-Ti-Cu shape memory alloy (SMA) films and the stress induced can deflect each side of the microgripper up to 55 (mu)m for a total gripping motion of 110 (mu)m. When fully open, the force exerted by the film corresponds to a 40 mN gripping force on the tip of the gripper.