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Thermal study of silicon optical microbenches with board heaters for soldering

机译：硅片光学微板的热学研究与板式加热器的焊接

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The combination of selected experimental measurements with finite element simulation provide a thorough understanding of thermal behavior of silicon microbenches with on-board heaters.

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作者
Pocha, M. D. ; Strand, O. T. ; Kerns, J. A.;
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年度 1996
页码 1-4
总页数 4
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Finite Element Method; Microelectronic Circuits; Heating; Mathematical Models; Packaging; Silicon; Silicon Oxides; Soldering; Substrates; Meetings;

机译：有限元法;微电子电路;加热;数学模型;封装;硅;氧化硅;焊接;基板;会议;

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Thermal study of silicon optical microbenches with board heaters for soldering

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