Effect of aspect ratio and sp2/sp3 content on the field emission properties of carbon films grown by Ns-spiked PECVD

摘要

The authors have deposited carbon films from mixtures of methane and N(sub 2) using Plasma Enhanced Chemical Vapor Deposition. By changing the percentage of N(sub 2) in the feed gas, they were able to produce films that have various aspect ratios and sp(sup 2)/sp(sup 3) contents. The film with the highest field emission contains spears of aspect ratio of 10:1. They also found that in their sp(sup 3)-rich films, higher sp(sup 2) content enhanced field emission. This is ascribed to improved charge transport to the field emission sites.