Future metrology needs for FEL reflective optics

摘要

An International Workshop on Metrology for X-ray and Neutron Optics has been heldMarch 16-17, 2000, at the Advanced Photon Source, Argonne National Laboratory, near Chicago, Illinois (USA). The workshop gathered engineers and scientists from both the U.S. and around the world to evaluate metrology instrumentation and methods used to characterize surface figure and finish for long grazing incidence optics used in beamlines at synchrotrons radiation sources. This two-day workshop was motivated by the rapid evolution in the performance of x-ray and neutron sources along with requirements in optics figure and finish. More specifically, the performance of future light sources, such as free-electron laser (FEL)-based x-ray sources, is being pushed to new limits in term of both brilliance and coherence. As a consequence, tolerances on surface figure and finish of the next generation of optics are expected to become tighter. The timing of the workshop provided an excellent opportunity to study the problem, evaluate the state of the art in metrology instrumentation, and stimulate innovation on future metrology instruments and techniques to be used to characterize these optics. This paper focuses on FEL optics and metrology needs. (A more comprehensive summary of the workshop can be found elsewhere.) The performance and limitations of current metrology instrumentation will be discussed and recommendations from the workshop on future metrology development to meet the FEL challenges will be detailed.