Miniaturized Domain Engineered Multilayer Actuators

摘要

Ferroelectric single crystals have been mainly targeted for medical ultrasoundand sonar applications. The principal application for our work is the development of miniaturized actuators for LIGA based electromechanical systems. Specifically, fundamental material properties, such as, friction, fracture toughness and mechanical strength need to be determined in the LIGA size range to develop a tool set that would permit efficient development of new miniaturized electromechanical systems. Miniaturized actuator with large displacements that operate at temperatures up to 80degC are needed to determine these fundamental properties. Displacements in excess of 20 um from a 5 mm long actuator are desired.