Distribution of the Flux of Charged Secondary Particles in the Cell of the Ion Optics System of an Ion Source

摘要

An electrolytic bath integrator was used to calculate the ion trajectories. This type of integrator was chosen because the accuracy requirements for calculation of the trajectories of secondary particles may be lower than those for calculation of the configuration of the main beam. An electrolytic bath is particularly suitable for calculations which take into account several options of the shape of the accelerating and extracting electrodes of the ion optics system, for which the configuration of the primary beam remains practically unchanged. (ERA citation 04:042109)