Minimizing Resputtering of Pt-Coated Microspheres in a Batch Magnetron Sputtering Process

摘要

Preventing DT loss from glass microspheres being smoothly coated with PT is needed during fabrication of laser fusion targets. Evidence indicates that the increase of substrate temperature due to resputtering will cause DT loss. Resputtering will prevent a smooth and uniform coating on these glass microspheres (140 mu m in diameter). This paper reviews the method that was developed to find a set of coating conditions to minimize the DT loss, and still be able to produce thick smooth Pt coated glass microspheres. (ERA citation 06:028340)