Preliminary Evaluation of SF sub 6 Conversion to SO sub 2 Using Existing Chemical Processing Facilities

摘要

Conversion of SF sub 6 to SO sub 2 has been demonstrated using equipment compatible with existing pilot plant facilities. However, while reduction of SF sub 6 to iron sulfide has been demonstrated as an efficient, economic, and scalable process operation, oxidation of the sulfide to SO sub 2 causes serious compatibility problems in existing (and commonly used) reactor materials. Further characterization of the sulfide oxidation is necessary to determine the usefulness of this conversion process. 13 refs., 4 tabs. (ERA citation 12:009393)