Characterization of Optical Surface Degradation: Angular Resolved Scatterometer

摘要

The Angular Resolved Scatterometer (ARS) is a sensitive diagnostic instrument for quantitatively specifying the degree of degradation for optical surfaces. ARS test results are reported for coatings undergoing aboveground (AGT) prompt x-ray irradiation. With the ARS, the light scattered from an optical surface is measured as a function of scattering angle, wavelength, and polarization. From these data the power spectral density (PSD) is calculated and contains the bandwidth-limited spatial information about the surface. Subtle changes in surface properties (e.g., radiation-induced absorption, polarization changes, or localized incipient melting) that would not be detected by surface roughness or reflectance measurements appear as a significant PSD change. The ARS data are an integration over all spatial frequencies and thus accurately and uniquely characterize each surface. (ERA citation 12:027160)