Back-Thinning Technique for TEM (Transmission Electron Microscopy) Examination of Thin Films on Sapphire (Al2O3).

摘要

Transmission electron microscopy (TEM) studies of vapor deposited, beam-treated (ion, electron and laser) samples require on-sided thinning in order for the treated layers to be examined. The purpose of this report is to describe a technique for thinning Al2O3 (sapphire) substrates on which Al-Mn alloys have been deposited in order to obtain electron-transparent thin area of the alloy layer. These detailed mechanical thinning procedures resulted in an average specimen preparation time of /approximately/1/2 day with a success rate above 90 percent whereas early attempts required /approximately/2 days per specimen with a success rate below 50%. 6 figs. (ERA citation 13:046081)