Theoretical Analysis of the Electrode Sheath in RF Discharges

摘要

Starting from a previous kinetic theory of the plasma boundary layer (charge exchange model of the presheath) we investigate a collisionless planar electrode sheath of a capacitively coupled rf discharge in the frequency range between the ionic and electronic plasma frequencies ( omega /sub p+/<< omega << omega /sub p-/). The resulting model equations are evaluated in an approximation based on thick sheath assumptions. We calculate the current voltage characteristics of the sheath and analyse the voltage distribution in a two electrode system. (ERA citation 14:026069)