Adhesion of silver films to ion-bombarded zirconia.

摘要

The effects of ion bombardment on thin film adhesion are not well understood for many metal-ceramic systems. Electron-beam-evaporated silver films were deposited on zirconia substrates either directly on the sputter-cleaned substrate or with the use of a bonding interlayer, and film adhesion was measured with a pull-type tester. Argon- and argon/oxygen-ion presputtering produced large increases in adhesion strength, the greatest occurring for the oxygen-ion assist. Deposition of a reactive Cr or Ti intermediate layer also produced large adhesion increases, with Cr the most effective. 19 refs., 3 figs., 1 tab.