首页> 美国政府科技报告 >Formation and annealing behavior of an amorphous layer induced by tin implantation into sapphire.
【24h】

Formation and annealing behavior of an amorphous layer induced by tin implantation into sapphire.

机译:锡注入蓝宝石诱导非晶层的形成和退火行为。

获取原文

摘要

The formation and annealing behavior of an amorphous layer produced by tin implantation into sapphire has been studied. Tin ions with 180 keV energy were implanted into (alpha)-Al(sub 2)O(sub 3) at 300 K with fluences ranging from 10(sup 15) to 10(sup 17) ...

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号