MEMS Shear Stress Sensor

摘要

A micro electro mechanical system (MEMS) was designed, manufactured, and vibrationally tested. The system consisted of a multitude of nearly identical shear stress sensors. The resonant frequency was measured to 57 sensors with a mean frequency of 90.037 KHZ and a standard deviction of 0.297 KHZ. Although attempted in water, only the air measurements were conducted.