PRODUCTION ENGINEERING MEASURE FOR MICROWAVE TRANSISTORS USING PROTON ENHANCED DIFFUSION TECHNOLOGY

摘要

During the period covered by the report, continued improvements in Proton-Enhanced Diffusion (PED) processing were realized including a method for delineating the full base profile. The thermal resistance tests were completed with measurements made on a thermal microscanner. Results showed that the new thermal resistance test set gave accurate results and that PED does not affect thermal resistance. The second set of engineering samples was completed and delivered. Average noise figure was better than specification on both types shipped. (Modified author abstract)