采用高能电子束辐照技术制造高反压大功率开关晶体管

摘要

The high energy (12MeV) electrons were used to irradiate the high-power switch transistors. The irradiated rntransistors had good switch performance, high thermal stability and parameter consistency%应用最佳能量为12MeV的电子束对大功率开关晶体管进行了辐照。结果表明，经电子束辐照的开关晶体管具有开关特性优rn良、热稳定性高、器件参数一致性好等特点。