Ion Implantation Studies of Titanium Metal Surfaces.

摘要

The influence of implants on the surface characteristics and oxidation of titanium and the use of various techniques to probe the surface structure have been studied. The surface condition of the metal was shown to affect greatly the implant distribution. Erbium implants did not segregate at all to a clean titanium surface but segregated completely to a carbon covered surface. Initial monolayer oxide formation is unaffected by implanted calcium, which does not segregate to the surface. The electronic structure of the oxide layer is, however, unexpectedly complicated, showing features in the electron energy loss spectrum very different from the clean surface. It is shown that care must be taken in studying the loss spectrum itself, especially in identifying the plasmon loss peaks and features associated with the clean surface. It has been found that different implants can seriously affect mechanical strain in the oxide, leading to rumpling and spalling in the case of Ti or Sb implants. These effects appear to be associated with implant segregation to the metal-oxide interface. A semiquantitative electron channeling method has been developed for determining damage levels in implanted materials.