Laser Photochemical Fabrication of Phase-Controlled 160-nm Period Gratings by Stimulated Second-Order Surface Plasma-Wave Scattering

摘要

Well-controlled 160-nm period gratings have been fabricated by employing surface plasma wave scattering obtained during laser photodeposition. Extended range phase control and simultaneous period having been demonstrated by seeding of second-order scattering in a manner analogous to injection locking and second-Stokes scattering. This technique may be useful for the fabrication of < 100-nm period structures.