Analytical Investigations of the Acceleration Sensitivity of Acoustic Bulk andSurface Wave Resonators

摘要

Earlier work has shown that the acceleration sensitivity of contoured SC-cutquartz resonators vanishes for perfect symmetry of the resonator plus support system. Since it is impossible to construct such a configuration in practice, a stiffened structure which reduces the increase in acceleration sensitivity with fabrication error hag been investigated. Calculations of the increase in acceleration sensitivity with fabrication error have been performed. The calculations reveal that a rectangular support configuration with an aspect ratio of 1.5 oriented in a specific direction yields optimal results. The calculations also show that two clips should be used on each of the large sides with one on each of the small sides. Optimal clip sizes and spacings between the clips were established. The use of this stiffened configuration should enable consistently low acceleration sensitivities to be obtained. Analyses of flat and contoured quartz resonators with beveled edges has been performed. The influence of the contouring and the beveling on the radial dependence of the modes was obtained. (AN).