Correction method for self-absorption effects of fluorescence x-ray absorption near-edge structure on multilayer samples

摘要

It is well known that fluorescence x-ray absorption spectroscopy suffers from the self-absorption effects for thick and concentrated samples. In this study, a simple correction method is provided for correcting the self-absorption effects of fluorescence x-ray absorption near edge structure (XANES) spectrum for multilayer samples. This method is validated by application on fluorescence XANES spectra for a Cr/C multilayer measured at different incidence angles. The errors produced by the self-absorption effects for the measured fluorescence x-ray absorption spectra without corrections are also estimated and discussed.