Characterization of room-temperature plastic deformation of β-Si_3N_4 by atomic force microscopy and transmission electron microscopy

摘要

Dislocation microstructures induced by room-temperature microhardness tests have been investigated in silicon nitride. Surface analysis of the residual indent by atomic force microscopy reveals intragranular slip bands and demonstrates that room-temperature plastic deformation involves dislocation motion as well as cross-slip events. Cross-slip events have been found to occur between {1010} prismatic planes. Transmission electron microscopy shows that dislocations have a Burgers vector b = [0001] and are located along the screw direction. Based on these observations, specific dislocation core configurations are discussed.