Method for Localizing and Measuring Structures Formed under Laser Microprocessing

摘要

To miniaturize the component base, it is necessary to develop new procedures for material pro- cessing and the laser technique is one such procedure. Structure geometry formed during laser microprocess- ing can be changed significantly from the geometry predetermined in the CAD model since the instrumen- tation settings can be not optimal. To automate the process of choosing parameters for laser microprocessing, a procedure for analyzing images that makes it possible to localize the microstructures for materials with dif- ferent physical–chemical and optical properties and to obtain the information on its geometrical parameters has been developed.