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首页> 外文期刊>Surface review and letters >Effect of coating thickness on the properties of TiN coatings deposited on tool steels using cathodic arc PVD technique
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Effect of coating thickness on the properties of TiN coatings deposited on tool steels using cathodic arc PVD technique

机译:阴极电弧PVD技术对涂层厚度对工具钢上TiN涂层性能的影响

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摘要

Titanium nitride (TiN) widely used as hard coating material, was coated on tool steels, namely on high-speed steel (HSS) and D2 tool steel by physical vapor deposition method. The study concentrated on cathodic arc physical vapor deposition (CAPVD), a technique used for the deposition of hard coatings for tooling applications, and which has many advantages. The main drawback of this technique, however, is the formation of macrodroplets (MDs) during deposition, resulting in films with rougher morphology. Various standard characterization techniques and equipment, such as electron microscopy, atomic force microscopy, hardness testing machine, scratch tester, and pin-on-disc machine, were used to analyze and quantify the following properties and parameters: surface morphology, thickness, hardness, adhesion, and coefficient of friction (COF) of the deposited coatings. Surface morphology revealed that the MDs produced during the etching stage, protruded through the TiN film, resulting in film with deteriorated surface features. Both coating thickness and indentation loads influenced the hardness of the deposited coatings. The coatings deposited on HSS exhibit better adhesion compared to those on D2 tool steel. Standard deviation indicates that the coating deposited with thickness around 6.7 mu m showed the most stable trend of COF versus sliding distance.
机译:广泛用作硬质涂层材料的氮化钛(TiN)通过物理气相沉积法涂覆在工具钢上,即涂覆在高速钢(HSS)和D2工具钢上。该研究集中于阴极电弧物理气相沉积(CAPVD),这是一种用于工具应用的硬涂层沉积的技术,它具有许多优势。但是,该技术的主要缺点是在沉积过程中会形成大液滴(MD),从而导致膜的形态更粗糙。各种标准的表征技术和设备,例如电子显微镜,原子力显微镜,硬度测试机,划痕测试仪和销钉圆盘机,用于分析和量化以下特性和参数:表面形态,厚度,硬度,附着力和沉积涂层的摩擦系数(COF)。表面形态表明,在蚀刻阶段产生的MD穿过TiN膜突出,导致膜的表面特征变差。涂层的厚度和压痕载荷都影响沉积的涂层的硬度。与D2工具钢相比,沉积在HSS上的涂层具有更好的附着力。标准偏差表明,厚度约为6.7μm的涂层显示出COF对滑动距离最稳定的趋势。

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