Comparison of modeling calculations with experimental results for rf glow discharge optical emission spectrometry

摘要

A model developed recently for a radio-frequency glow discharge, is applied to experimental Grimm-type discharge conditions, to check the validity of the model calculations. The calculated electrical characteristics (rf voltage, d.c. bias voltage, electrical power, peak-to-peak current, as well as the time-profiles of voltage and current), and the calculated erosion rates are compared with the measured values for an rf frequency of 3.5 MHz. The electrical characteristics are found to be in fairly good agreement. The calculated and measured erosion rates show larger discrepancies. Compared to the d.c. Grimm-type glow discharge, where similar quantities were compared and were found in excellent agreement, the agreement is less satisfactory in the rf discharge. This illustrates that the rf discharge is much more complicated than a d.c. discharge, and that more fundamental studies are required.