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Flexure mechanism-based parallelism measurements for chip-on-glass bonding

机译:基于弯曲机制的玻璃芯片接合并行度测量

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Recently, liquid crystal displays (LCDs) have played vital roles in a variety of electronic devices such as televisions, cellular phones, and desktop/laptop monitors because of their enhanced volume, performance, and functionality. However, there is still a need for thinner LCD panels due to the trend of miniaturization in electronic applications. Thus, chip-on-glass (COG) bonding has become one of the most important aspects in the LCD panel manufacturing process. In this study, a novel sensor was developed to measure the parallelism between the tooltip planes of the bonding head and the backup of the COG main bonder, which has previously been estimated by prescale pressure films in industry. The sensor developed in this study is based on a flexure mechanism, and it can measure the total pressing force and the inclination angles in two directions that satisfy the quantitative definition of parallelism. To improve the measurement accuracy, the sensor was calibrated based on the estimation of the total pressing force and the inclination angles using the least-squares method. To verify the accuracy of the sensor, the estimation results for parallelism were compared with those from prescale pressure film measurements. In addition, the influence of parallelism on the bonding quality was experimentally demonstrated. The sensor was successfully applied to the measurement of parallelism in the COG-bonding process with an accuracy of more than three times that of the conventional method using prescale pressure films.
机译:近年来,由于液晶显示器(LCD)的体积,性能和功能增强,它们在诸如电视机,蜂窝电话和台式机/笔记本电脑监视器等各种电子设备中起着至关重要的作用。然而,由于电子应用中的小型化趋势,仍然需要更薄的LCD面板。因此,玻璃上芯片(COG)粘接已成为LCD面板制造过程中最重要的方面之一。在这项研究中,开发了一种新型传感器来测量键合头的工具提示平面与COG主键合机的支撑板之间的平行度,该平行度先前已通过工业中的预分压膜进行了估算。本研究开发的传感器基于挠曲机制,可以测量两个方向上的总按压力和倾斜角度,这些方向满足平行度的定量定义。为了提高测量精度,使用最小二乘法基于总压力和倾斜角的估计值对传感器进行了校准。为了验证传感器的准确性,将并行度的估计结果与预缩放压力膜测量的结果进行了比较。此外,实验证明了平行度对键合质量的影响。该传感器已成功应用于COG粘合过程中的平行度测量,其精度是使用预缩放压力膜的传统方法的三倍以上。

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