Status and Future Promise of Excimer Laser Annealing for LTPS on Large Glass Substrates

摘要

Low-Temperature Polycrystalline Silicon (LTPS) is the enabling backplane technology for AMOLED displays and small to medium sized high-resolution AMLCDs. Recently, Excimer Laser Annealing (ELA) equipment has made significant progress in scaling for cost-effective large-scale production. In this paper, we discuss the key elements of ELA equipment and the recent and future milestones for LTPS on large substrates.