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3.5 Inch QCIF+ AM-OLED Panel Based on Oxide TFT Backplane

机译:基于氧化物TFT背板的3.5英寸QCIF + AM-OLED面板

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摘要

JGZO TFTs were fabricated on a glass substrate by conventional photo-lithography and wet-etching processes. The real mobility of our device was about 95 cm /Vs and had very low dependence on the variation ofW/L, channel length and channel width. An IGZO TFT array was also fabricated and a top emission OLED device was successfully driven by it. Therefore, the oxide TFT could be one of the promising candidates as a backplane for the OLED device.
机译:通过常规的光刻和湿蚀刻工艺在玻璃基板上制造了JGZO TFT。我们设备的真实迁移率约为95 cm / Vs,并且对W / L,通道长度和通道宽度的变化的依赖性非常低。还制造了IGZO TFT阵列,并成功驱动了顶部发射OLED器件。因此,氧化物TFT可以作为OLED器件的背板有希望的候选者之一。

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