Photosensitive Insulating Materials by Organic/Inorganic Hybrid Technologies as a Passivation Layer on TFT LCDs

摘要

Novel silica-based spin on glass (SOG) materials by organic/inorganic hybrid technologies have high photosensitivity, insulating performance, transparency, and heat resistance. These materials can make a passivation layer on TFT LCDs with only standard photolithography process and low heat treatment, and thus they provide a novel vacuum-less process on TFT LCDs.